论文中的一段英文,请高手帮助翻译200分求助!
原文:
B. Process Development Tool
Lithography modeling has also proven to be an invaluable tool for the development of new lithographic processes or equipment. Some of the more common uses include the optimization of dye
loadings in photoresist [23,24], simulation of substrate reflectivity [25,26], the applicability and optimization of top and bottom antireflection coatings [27,28], and simulation of the effect of bandwidth on swing curve amplitude [29,30]. In addition, simulation has been used to help understand the use of thick resists for thin film head manufacture [31] as well as other non-semiconductor applications. Modeling is used extensively by makers of photoresist to evaluate new formulations [32,33] and to determine adequate
measures of photoresist performance for quality control purposes [34]. Resist users often employ modeling as an aid for new resist evaluations. On the exposure tool side, modeling has become an indispensable part of the optimization of the numerical aperture and partial coherence of a stepper [35-37] and in the understanding of the print bias between dense and isolated lines [38]. The use of optical proximity correction software requires rules on how to perform the corrections, which are often generated with the help of lithography simulation [39].
As a development tool, lithography simulation excels due to its speed and cost-effectiveness. Process development usually involves running numerous experiments to determine optimum process conditions, shake out possible problems, determine sensitivity to variables, and write specification limits on
the inputs and outputs of the process. These activities tend to be both time consuming and costly. Modeling offers a way to supplement laboratory experiments with simulation experiments to speed up this process and
reduce costs. Considering that a single experimental run in a wafer fabrication facility can take from hours to days, the speed advantage of simulation is considerable. This allows a greater number of simulations than would be practical (or even possible) in the fab.
翻译:
B.工艺过程开发工具
Lithography塑造也被证明是为新的平版印刷的过程或设备的发展的一个无价的工具。 某些更加共同的用途包括染料的优化 在光致抗蚀剂[23,24的]基体反射性[25,26的] loadings,模仿,上面和底部抗反射膜[27,28的]带宽的作用的适用性和优化和模仿对摇摆曲线高度[29,30]。 另外,模仿被用于帮助了解使用浓厚为薄膜头制造[31]抵抗并且其他非半导体应用。 塑造由光致抗蚀剂制造商广泛地用于评估新的公式化[32,33]和确定充分 光致抗蚀剂表现measures质量管理的打算[34]。 抵抗用户经常使用塑造作为新的援助抵抗评估。 在曝光工具边,塑造成为了数值口径和部分相干性的优化的一个不可缺少的部分步进[35-37]和在对在密集和被隔绝的线[38之间的]印刷品偏心的理解。 使用光学接近度更正软件要求关于怎样的规则执行更正,在石版印刷模仿[39帮助下]经常引起。
As开发工具,石版印刷模仿擅长由于它的速度和成本效益。 工艺过程开发通常介入跑许多实验确定最宜的处理情况,震动可能的问题,确定敏感性到可变物和写规格限制
the过程的输入和输出。 这些活动倾向于是费时和昂贵的。 塑造提供一个方式用仿真实验补充实验室实验加速这个过程和
reduce费用。 考虑在薄酥饼制造设施的实验性奔跑可能从几小时采取到几天,模仿的速度好处是可观的。 这比实用(甚至可能的)允许模仿的一个更加了不起的数字在很好。
摘要
随着我国社会经济的持续高速发展和投资体制改革的不断深化,环境影响评价已经成为建设项目在开工建设前必经的一个审批关, 成为 防止新建项目产生污染和生态环境破坏的主要措施,是我国实施可持续发展战略、实行以预防为主环保政策的重要体现。
Abstract
With the continuous rapid development of Chinese society and economy and the deepening of the reformation of investment system, the environmental impact assessment(EIA) of a construction project has becoming a necessary step before it can get started and the main measures to prevent the pollution and the destroy of ecological environment that produced by new constructions, which is also an important embodiment of the real purpose of sustainable development strategy and prevention —oriented policy of Chinese governments.
以上为第一段
本设计对白云区龙博置地广场进行环境影响评价。 主要工作包括:(1)调查和分析项目环境污染和生态破坏现状, 并根据建设项目污染物排放状况,结合场地周围环境特点,确定评价范围;(2)对地下水、空气和声环境进行现状评价; (3)通过对建设项目的建设过程所造成的各种污染及生态破坏的预测, 确定评价项目对环境影响的范围和程度; (4)分析论证项目现有污染防治措施的可行性和合理性, 提出有效的生态环境破坏减缓、恢复与补偿措施, 从环境保护及生态恢复角度论证项目建设的可行性, 为相关工作提供科学依据。
关键词:环境污染,可持续发展,可行性
This deign is an EIA of the Longbai landmark in Baiyun district. The work of this paper includes mainly four aspects as followed: (1)The present situation of the environment pollution and the ecological damage was investigated and analyzed and, according to the pollutants discharged by the project and considering the environment characteristics around, the assessment range was determined. (2) The current status of groundwater, air and acoustic environment was assessed. (3) The range and degree influencing the environment by the project assessed were determined by predicting the various pollutions and ecological damage caused in the construction process. (4) At the end of this paper, it analyzed the rationality of the existing measures of pollution preventions and controls and discussed the feasibility of the project construction from the perspective of environmental protection and ecological restoration and put forward some effective measures to slow down, recover and compensate the ecological destruction, which offered some scientific base for further work.
Keyword: environment pollution, sustainable development, feasibility
在翻译过程中,对所给原文做了一些细微的调整,一并附于上面。看着就这么两段,翻译起来还挺费时的,居然用了3个小时。呵呵,还是自己的英语水平还不行呢,还得多练练。
Although the research, development and manufacturing applications of lithography simulation presented above give ample benefits of modeling based on time, cost and capability, the underlying power of simulation is its ability to act as a learning tool.
尽管如上所述,仿真平板印刷术在研究,发展,制造应用方面的优点已经通过时间,成本,性能三方面举例论证了.但是,仿真的潜力却是在作为学习工具的能力上面。
Proper application of modeling allows the user to learn efficiently and effectively.
在模拟方面的适当运用能让使用者更得心应手.
There are many reasons why this is true.
有几大原因可以解释这一点。
First, the speed of simulation versus
experimentation makes feedback much more timely.
第一,和实验相比,仿真的反馈速度更及时。
Since learning is a cycle (an idea, an experiment, a measurement, then comparison back to the original idea), faster feedback allows for more cycles of learning.
由于学习是个循环(一种思想,实验,测量法,和原始的比对)更迅速的反馈可以赢得更多的学习周期。
Since simulation is very inexpensive, there are fewer inhibitions and more opportunities to explore ideas.
而且仿真费用低廉,所以较少限制,有更多的机会尝试.
And, as the research application has shown us, there are fewer physical constraints on what “experiments”
can be performed.
正如调查应用中的结果显示给我们的一样,对什么类型实验有了更少的物理限制.
All of these factors allows the use of modeling to gain an understanding of lithography.
以上所有这些对仿真技术的应用使得我们对平板印刷术的有了进一步的了解.
Whether learning fundamental concepts or exploring subtle nuances, the value of improved knowledge can not be overstated.
不管是学习基础理论原理或是探索物质的细微差别,改良知识的价值怎么评价也不过分。
In the sections that follow, the use of lithography simulation in manufacturing will be explored in much greater detail.
在下面这个部分,仿真平板印刷术在制造方面的应用将会有更重大的细节被发现。
2. THE USE OF LITHOGRAPHY SIMULATION IN MANUFACTURING
2.在制造方面的仿真平板印刷术的应用
A. Film Stack Optimization
A.Film Stack最优化
Film stack optimization is the most frequent use of lithography simulation in a manufacturing environment for a number of reasons.
Film Stack最优化在制造业的环境中是最常会用到仿真平板印刷术的.有如下原因.
First, film stacks frequently change in the fab and, other than the bottom antireflection coating (BARC) and resist, this film stack is not controlled by the photolithography
group.
第一,在fab里film stacks经常改变,不同于底层的抗反射涂层和抗蚀剂,这个film stacks 不受光刻术的控制。
Thus, the lithography group must respond to these film stack changes with adjustments to the lithography process.
因而,平板印刷术的集群必须要根据这些film stack 的变化来调整平板印刷的进程。
From a lithography standpoint, the most important film stack property is the reflectivity of the substrate.
从平板印刷的立场来说,film stack最重要的部分就是感光底层的反射率。
Unfortunately, there is no way to measure the reflectivity of the substrate when coated with resist (substrate reflectivity in air has no meaning for this application).
不理想的是,如果给涂上一层抗蚀[防腐]剂(对在空气中感光底层测量反射率没有意义。)就无法测量感光底层的反射率了。
Thus, all BARC optimization efforts require the use of simulation.
因而,所有BARC最优化的努力需要仿真技术的应用。
In turn, this simulation requires accurate measurement of BARC optical parameters (thickness, n, & k).
再者,这种仿真技术需要BARC光参数(厚度,N,&K)的精确测量.
学习工具
虽然研究,开发和制造应用的光刻仿真介绍了上述提供足够的好处建模基于时间,成本和能力,他们背后的力量模拟是它有能力作为学习的工具。正确运用建模,使用户可以学习效率和更有效的。固然有很多原因,这是事实。第一,速度模拟银两
实验,使信息反馈更加及时。由于学习是一个周期(一个想法,一个试验,测量,然后比较回到了原来的想法) ,快反馈,让更多的学习循环。
由于模拟是非常低廉,有少禁忌,并有更多机会开拓思路。
此外,由于研究应用向我们表明,有更少的物理限制,对什么是"实验"
可演出。所有这些因素都允许使用模拟,以了解光刻技术。
是否学习基本概念或探索微妙的细微差别,其价值提高了知识怎么强调也不过分。在各款跟进,利用光刻仿真技术在制造业,将在探索更为详细。
2 。利用光刻仿真技术在制造业
答:电影栈优化
电影栈优化,是最经常使用的光刻仿真技术在制造环境中,为有多种原因。首先,电影栈频繁变动,在晶圆厂,除了底部抗反射涂层( barc )和抵制,这是一部栈是不是由光刻
组。因此,光刻技术组必须回应这些电影栈的变化与调整,使光刻工艺。从光刻技术的角度来说,最重要的电影栈财产是反射衬底。不幸的,是没有办法衡量的反射基材涂布时与抗拒(衬底反射在空气中,没有意义,为此项申请) 。因此,所有barc优化努力都需要使用模拟。反过来,这种模拟需要精确测量barc光学参数(厚度,氮, & k )款。
D。学习工具
虽然以上列出的仿真平版印刷的研究,开发和制造应用提供足够的建立与时间,成本和能力上的益处,而模拟背后的力量在于它有能作为学习的工具。适当的模具应用可以让使用者学会有效率和有效地的使用。首先,对模拟实验的速度可以更适时的反聩。学习是一种循环(一个主意,一个实验,一种度量,接着和原始的想法进行对比),更快的反馈可以带来更多的学习。
模拟并非很昂贵,所以有更多的抑制和更多的机会区探索想法。而且,研究的应用告诉我们,在实验里并没有多少物质约束可言。所有这些因素使得平版印刷的建模得到更多的得到理解。无论学习基础概念还是探寻微妙的细微差别,知识扩展的价值不容忽视。在接下来的部分里,平版印刷模拟在制造业中的运用将被开发的越来越细致。
2.平版印刷模拟在制造业中的运用
A。薄膜体最优化
出于很多原因,薄膜体最优化是在平版印刷模拟制造中使用得最多的。第一,薄膜体最优化是不受光刻法控制的。因此,光刻法必须通过校正光刻过程适应这些薄膜体的改变。在光刻的立场上,最重要的 是薄膜体性能是对底层的反射率。不幸的是,当覆盖着防染材料(防染材料在空中的反射率对这个运用毫无意义)时无法去测量底片的反射率。因此,所有的BARC最优化效果都要求模拟的运用。
依次,这种模拟要求对BARC光学参数的精确的测量(密度,N&K)
大哥,原来这篇也是你的,我都累死了,您这专业还真 是折腾人 啊 ····
你光这么的 没什么用 我给你个翻译的网站 很好用的 什么英文都可以翻译 而且很准确 对学习也有帮助 http://fy.iciba.com/ 你自己试试 完了把分给我 谢谢
四学习工具
虽然研究,开发和制造应用的光刻仿真介绍了上述提供足够的好处建模基于时间,成本和能力,他们背后的力量模拟是它有能力作为学习的工具。正确运用建模,使用户可以学习效率和更有效的。固然有很多原因,这是事实。第一,速度模拟银两
实验,使信息反馈更加及时。由于学习是一个周期(一个想法,一个试验,测量,然后比较回到了原来的想法) ,快反馈,让更多的学习循环。
由于模拟是非常低廉,有少禁忌,并有更多机会开拓思路。
四学习工具
虽然研究,开发和制造应用的光刻仿真介绍了上述提供足够的好处建模基于时间,成本和能力,他们背后的力量模拟是它有能力作为学习的工具。正确运用建模,使用户可以学习效率和更有效的。固然有很多原因,这是事实。第一,速度模拟银两
实验,使信息反馈更加及时。由于学习是一个周期(一个想法,一个试验,测量,然后比较回到了原来的想法) ,快反馈,让更多的学习循环。
由于模拟是非常低廉,有少禁忌,并有更多机会开拓思路。
此外,由于研究应用向我们表明,有更少的物理限制,对什么是"实验"
可演出。所有这些因素都允许使用模拟,以了解光刻技术。
是否学习基本概念或探索微妙的细微差别,其价值提高了知识怎么强调也不过分。在各款跟进,利用光刻仿真技术在制造业,将在探索更为详细。
2 。利用光刻仿真技术在制造业
答:电影栈优化
电影栈优化,是最经常使用的光刻仿真技术在制造环境中,为有多种原因。首先,电影栈频繁变动,在晶圆厂,除了底部抗反射涂层( barc )和抵制,这是一部栈是不是由光刻
组。因此,光刻技术组必须回应这些电影栈的变化与调整,使光刻工艺。从光刻技术的角度来说,最重要的电影栈财产是反射衬底。不幸的,是没有办法衡量的反射基材涂布时与抗拒(衬底反射在空气中,没有意义,为此项申请) 。因此,所有barc优化努力都需要使用模拟。反过来,这种模拟需要精确测量barc光学参数(厚度,氮, & k )款
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东莞市17239097308: 请英语高手帮我翻译一段话,这是论文的摘要部分,十分感谢,急用! - ?
唱要雪町: "Golden Week" holiday tourism is to further expand domestic demand, stimulate consumption, and named by the State Council put forward a new way to travel, with the overall large-scale, high efficiency, high concentration of activities in time and...
东莞市17239097308: 求助英语专业高手!!人工翻译一小段英文!!帮帮我吧 - ?
唱要雪町: A direct translation of this slogan could have been "Loaded with an Intel" or something, but it wouldn't have caught the eyes of the Chinese consumers. In order to arouse the consumers' interest and stimulate their desire to purchase, the translator ...
东莞市17239097308: 求英语高手麻烦帮翻译论文英文摘要~急~万分感谢~ - ?
唱要雪町: Summary: For a long time, the mathematical model of setting up infectious disease describes the spread course of infectious disease, analyze that receives the change law of the number of the infected, explore means of preventing infectious ...
东莞市17239097308: 请英语高手帮忙翻译一段论文摘要(汉译英)比较急!!!万分感激!!! - ?
唱要雪町: Abstract:In an increasingly competitive global environment,the integrated leadership of business leaders is crucial for the survival and development of the business organisation.This article gives an in-depth analysis of the situations both ...
东莞市17239097308: 请高手帮忙翻译一段文字,在线翻译的不要! 谢谢 ! - ?
唱要雪町: "It is the organization performance of the alloy that this text has studied C-Cr-Mo-V which resists the wearing and tearing with better ability , h...
东莞市17239097308: 论文需要 请英语高手帮我翻译以下一段文字 要求语法准确 谢绝翻译软件 谢谢 - ?
唱要雪町: Community is a carrier of national fitness program,the launch of community residents fitness activity affect the realization of national fitness program.Through investigating the status of Shishi Garden City community residents sports participation,...
东莞市17239097308: 求高手帮忙翻译市场营销英文论文中的段落?
唱要雪町:总的来说,市场总体投资回报必须在一个 定义的知识结构的目的 营销和价值创造.分析 框架必须从市场总体投资回报 组件的营销的贡献价值创造的. 这些组件净销售收入增长和品牌 品牌的毛利润,品牌资产. 品牌资产可以定义和测量的网络 现值(NPV)现金流量表(领口或最低),它源于世代的消费者购买品牌.这些消费者“营销”的定义是一个连续的,从行为主义(百分之百的审判的要求)和attitudinally(从接纳品牌崇拜的品牌).